ECM Greentech offers a range of furnaces and processes for semiconductor in several devices (power devices, sensors, mems, optoelectronics), from wafer processing for R&D to Mass Production. Our experts support projects from equipment design & engineering, process challenges, up to Technology integration challenges. Feel free to submit your project and engage with our teams.

Wafer processing
Furnaces.

tubestar furnace

Tubestar,
Horizontal furnace

  • Ceramics
  • Glass
  • III-V
  • II-VI
  • Sapphiire
  • Superconductors
  • GaN
  • SiC
  • Metal
  • Quartz
  • Silicon
DF Series furnace

DF Series,
Horizontal furnace

  • Si
  • SiC
  • GaN
  • Sapphire
  • ceramic
  • quartz
  • metal
vertical furnace

VAR Series,
Vertical furnace

  • Ceramics
  • Glass
  • III-V
  • II-VI
  • Sapphiire
  • Superconductors
  • GaN
  • SiC
  • Metal
  • Quartz
  • Silicon
memslab furnace

Memslab,
Vertical furnace

  • Si
  • SiC
  • GaN
  • Sapphire
  • ceramic
  • quartz
  • metal
batch type vertical furnace

VS Series,
Vertical furnace

  • Si
  • SiC
  • GaN
  • Sapphire
  • Quartz
  • Glass
  • Metal
  • III V
  • II VI
  • Superconductors
actistar furnace

Actistar,
Vertical furnace

  • SiC wafer
  • SiC boule
oxistar furnace

Oxistar,
Vertical furnace

  • SiC wafer
close spaced sublimation furnace

Close Space Sublimation
System

  • Silicon
  • SiC
  • GaN
  • Sapphire
  • Quartz
  • Glass
  • Metal
  • III-V
  • III-VI
  • Superconductors

Discover our other
furnaces for PV & Crystal Growth

PV manufacturing equipment

ECM Greentech specializes in the design and commissioning of turnkey equipment and lines for the manufacture of PV panels.

PV manufacturing equipment
pv manufacturing

Crystal Growth furnaces

Discover our full range of furnaces for Crystal Growth applications, with the Cyberstar pulling head technology.

Crystal Growth furnaces
yag crystal growth