ECM Greentech offers a range of furnaces and processes for semiconductor in several devices (power devices, sensors, mems, optoelectronics), from wafer processing for R&D to Mass Production. Our experts support projects from equipment design & engineering, process challenges, up to Technology integration challenges. Feel free to submit your project and engage with our teams.
Wafer processing
Furnaces.
Tubestar,
Horizontal furnace
Materials
- Ceramics
- Glass
- III-V
- II-VI
- Sapphiire
- Superconductors
- GaN
- SiC
- Metal
- Quartz
- Silicon
VAR Series,
Vertical furnace
Materials
- Ceramics
- Glass
- III-V
- II-VI
- Sapphiire
- Superconductors
- GaN
- SiC
- Metal
- Quartz
- Silicon
VS Series,
Vertical furnace
Materials
- Si
- SiC
- GaN
- Sapphire
- Quartz
- Glass
- Metal
- III V
- II VI
- Superconductors
Discover our other
furnaces for PV & Crystal Growth
PV manufacturing equipment
ECM Greentech specializes in the design and commissioning of turnkey equipment and lines for the manufacture of PV panels.
Crystal Growth furnaces
Discover our full range of furnaces for Crystal Growth applications, with the Cyberstar pulling head technology.
